| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining method and a laser beam machining apparatus for enhancing the positioning accuracy and performing machining with high accuracy. <P>SOLUTION: The laser beam machining method to correct the irradiation position at which a work 53 is irradiated with laser beams emitted from a laser beam oscillator 41 via a galvano-scanner 54 and an fθlens 48 comprises an irradiation step of irradiating the laser beams at a plurality of reference irradiation positions, an error measurement step of measuring the error between a plurality of irradiation points obtained from the irradiation step and the reference irradiation position, and a correction step of correcting the emission timing of the laser beams emitted from the laser beam oscillator on the basis of the error obtained in the error measurement step. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
