POLISHING METHOD OF PLATE-LIKE MEMBER

摘要

PROBLEM TO BE SOLVED: To provide a polishing method for particularly and uniformly polishing a plate-like member such as a thin printed wiring board over the whole surface without damage such as a curve by an easy method, and reducing a dimensional change by thermal deformation of the plate-like member.

SOLUTION: When polishing the plate-like member, a back face of a polishing object surface of the plate-like member is adhered to a plane member rigid more than the plate-like member and having at least one opening, and the plate-like member is polished while pressing the plate-like member to the plane member by a polishing member. The plate-like member and the plane member are adhered by using surface tension of liquid without using an adhesive and a tape.

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