发明名称 |
SYSTEM, METHOD AND APPARATUS FOR THIN-FILM SUBSTRATE SIGNAL SEPARATION USING EDDY CURRENT |
摘要 |
<p>A system and method for determining a component of an eddy current sensor (ECS) signal attributable to a substrate includes placing a substrate in a first position relative to an ECS at a first distance from the ECS. The substrate can include a conductive film on a first surface of the substrate. A first ECS signal can be detected with the substrate in the first position. The substrate can then be inverted relative to the ECS such that the substrate is in a second position relative to the ECS at a second distance from the ECS. The second distance is equal to the first distance less about a thickness of the substrate. A second ECS signal is detected with the substrate in the second position. A difference signal is determined. The difference signal is equal to a difference between a first signal level on a calibration graph for the ECS and the second signal level. The second signal level being shifted a distance about equal to the thickness of the substrate. A first substrate component of the first ECS signal is calculated. The first substrate component of the first ECS signal is equal to a product of the first distance and the difference signal, divided by the thickness of the substrate.</p> |
申请公布号 |
WO2004059313(A1) |
申请公布日期 |
2004.07.15 |
申请号 |
WO2003US41084 |
申请日期 |
2003.12.22 |
申请人 |
LAM RESEARCH CORPORATION |
发明人 |
GOTKIS, YEHIEL |
分类号 |
G01B7/06;G01N27/72;G01R33/12;(IPC1-7):G01N27/72 |
主分类号 |
G01B7/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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