| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a fluid control device which has hyperfine pores, particularly pores of an average diameter of at most 10 nm (preferably at most 3 nm) and ensures a flux quantity. <P>SOLUTION: The fluid control device is provided with an anodized alumina film 11 having pores 13 and a silicon-based micropore film 12 having micropores 14 obtained from an AlSi mixture film. In addition, the pores 13 are jointed at least to a part of the micropores 14. In the production method of the fluid control device, from a film having at least aluminum and the AlSi mixture film, the aluminum part forms the anodized alumina film 11, which is a pore film, by means of an anode oxidation method, and the silicon-based micropore film 12, which is a micropore film having silicon as a main component, is formed from the AlSi mixture film by means of an anode oxidation method or etching method. For the silicon-based micropore film 12, amorphous silicon and silicon oxide each are used, and their pore sizes are at most 10 nm. The fluid control device can be used in a filter or a ultrafilter membrane through which air and gases are passed. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
