| 摘要 |
PROBLEM TO BE SOLVED: To eliminate the need of adjusting work in the midst of observing a sample and also to surely acquire expected three-dimensional image data even in the case of long-time observation. SOLUTION: The extended image data of the three-dimensional image data acquired by first observation and second observation, for instance, at a plurality of observation points, are generated, and compared to detect the positional deviation in X-axis and Y-axis directions and the focus displacement in a Z-axis direction of the sample 6 associated with the lapse of time by a variation detection part 35 at previously set intervals of interval time, and the position of the motor-driven stage 5 in the X-axis and Y-axis directions or the height in the Z-axis direction is corrected on the basis of the positional deviation and the focus displacement by a correction part 36. COPYRIGHT: (C)2004,JPO&NCIPI
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