| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas type rate sensor which produces always a stable gas flow in a sensor body and keeps a coupling precision between the sensor body and a pump, and no influence due to a temperature change is recognized. SOLUTION: A gas type rate sensor consists of a nozzle hole, a gas flow path, a sensor bridge crossing the gas flow path, a gas supply port connecting to the nozzle hole at the upper part of the gas flow path, the sensor body forming each gas exhaust port at the rear part of the gas flow path. The gas type rate sensor is characterized that the pump is integrally constituted with a first substrate and a second substrate, wherein the first substrate mounted on the sensor body comprising: a vibration plate having a gas passing hole at the end which is vibrated by a piezoelectric element mounting on the vibration plate; a pump intake and exhaust chamber having an intake port at the other side of the gas passing hole, and the second substrate forming a pump back pressure chamber is mounted on the first substrate and both the first substrate and the second substrate are connected. COPYRIGHT: (C)2004,JPO&NCIPI
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