| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for machining a fine inclined face capable of forming a pitch of the fine inclined face and an oblique angle at an arbitrary pattern. <P>SOLUTION: A laser beam transmitter 10 uses YAG-SHG (wavelength 532nm), pulse width 15n second, and the wavelength is converted to 266nm using a wavelength transducer 30 to obtain beam dia.ϕ15μm, fluence 1μJ/pulse, and a single irradiation is performed to each place and a hollowing process is executed on a polyimide film surface which is a work 16 to be machined. Further, on this occasion, the beam having a Gaussian type beam profile passes through an aspherical lens specially manufactured as a condensing lens 14 by an optical design and changes to a substantially conical type beam profile so that irradiation is performed to the polyimide film surface. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
