METHOD FOR MANUFACTURING SOUND DETECTING DEVICE

摘要

PURPOSE: A method for manufacturing a sound detecting device is provided to reduce manufacturing cost by forming an upper metal electrode through a metal plating process. CONSTITUTION: A driving circuit(120) of a sound detecting device is integrated on a silicon substrate(100). A lower electrode line(111) and an upper electrode line(112) are formed on left and right sides of an upper portion of the silicon substrate(100). A lower electrode(130) is formed between the lower electrode line(111) and the upper electrode line(112). The driving circuit(120) of the sound detecting device is electrically connected to the lower electrode line(111) or an upper electrode line(112). The lower electrode(130) and the lower electrode line(111) are electrically connected to each other. An upper electrode is supported by the silicon substrate(100) to be raised from the lower electrode(130). The upper electrode is connected to the upper electrode line(112) and provided with plural through holes.