| 摘要 |
PURPOSE: A buffer structure of an LCD(Liquid Crystal Display) and a forming method thereof are provided to reduce a combination stress between buffer layers by forming a SiON layer capable of performing the role of buffer. CONSTITUTION: A buffer layer(105') having a multilayer structure is formed on a substrate(100) including glass material. A semiconductor layer is formed on an upper portion of the buffer layer(105'). The first buffer layer(105'a), the second buffer layer(105'b) and the third buffer layer(105'c) deposited on the substrate(100) are all formed by using PECVD(Plasma Enhanced Chemical Vapour Deposition) method and an identical chamber. The second buffer layer(105'b) is made of SiON, thereby reducing the stress between buffer layers through the lattice structure of SiON particles.
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