发明名称 Semiconductor device and method for manufacturing same
摘要 Disclosed is a semiconductor device having a driver circuit operable at high speed and a method for manufacturing same. An active matrix liquid crystal display device uses a polysilicon film for its TFT active layer constituting a pixel matrix circuit because of low off current characteristics. On the other hand, a TFT active layer constituting driver circuits and a signal processing circuit uses a poly silicon germanium film because of high speed operation characteristics.
申请公布号 US6759677(B1) 申请公布日期 2004.07.06
申请号 US19990262657 申请日期 1999.03.04
申请人 发明人
分类号 G02F1/136;G02F1/1362;G02F1/1368;H01L21/336;H01L21/77;H01L21/84;H01L27/12;H01L29/786;(IPC1-7):H01L29/04 主分类号 G02F1/136
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