| 摘要 |
PURPOSE: A thin film filter and a fabricating method thereof are provided to prevent the deformation and simplify a fabrication process by forming an air gap on a photosensitive glass. CONSTITUTION: A glass(30) having a photosensitive characteristic is provided. An air gap region is formed on the glass. An insulating layer(31) is deposited on an exposure region of the glass. A bottom electrode metal material is coated on the insulating layer. A bottom electrode(37) is formed by etching the bottom electrode metal material. A piezoelectric layer(35) is formed on the glass. A top electrode metal material is coated on the piezoelectric layer. A top electrode(33) is formed by etching the top electrode metal material. A protective layer is formed on the glass. The exposure region is opened by performing an etching process. An air gap(43) is formed by etching the exposure region. The protective layer is removed from the glass. |
