| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized opacimeter for detection of high reliability. SOLUTION: This opacimeter is provided with a cylindrical gas flow passage forming material for partitioning a gas flow passage through which inspection-objective gas flows along a longitudinal direction thereof, at least two light passing windows formed in one side of opposed walls, opposed each other, of the gas flow passage forming material and at least one light passing window in the other side thereof, a purge air flowing mechanism for making the purge air flow along outer circumferences of the opposed walls in the gas flow passage forming material, a light source arranged to be opposed to one of the opposed walls in the gas flow passage forming material via a purge air passage, a reflection mirror arranged to be opposed to the other side of the opposed walls, and a photodetection sensor incident with light emitted from the light source via the reflection mirror. The light emitted from the light source passes through the light passing windows and the gas flow passage to be reflected by the reflecting mirror, and the light reflected by the reflecting mirror passes through the light passing windows and the gas flow passage to get incident into the photodetection sensor. COPYRIGHT: (C)2004,JPO&NCIPI
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