METHOD AND APPARATUS FOR MANUFACTURING WASHING MATERIAL, AND WASHING SYSTEM USING WASHING MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a washing material capable of washing a member to be washed such as a substrate well and effectively. SOLUTION: The washing material 1 is ejected to or allowed to impinge against the member to be washed such as the substrate to wash the member to be washed. This washing material 1 is formed into a sherbet-like shape wherein a solid and a liquid coexist in a state containing ice particles and manufactured by supercooling a mixed liquid comprising pure water and an organic compound liquid the solidification point of which is lower than that of pure water and applying external force to the supercooled liquid 1B being the cooled mixed liquid to form ice crystals. The application of external force to the supercooled liquid 1B is performed, for example, by providing a suddenly expanded part 21b to the flow channel 21 of the supercooled liquid 1B. That is, the supercooled liquid 1B flows in the suddenly expanded part 21b to form vortex flows 1C and the supercooled state of the supercooled liquid 1B is eliminated by the stirring force applied by the vortex flows 1C and a part or the whole of moisture in the supercooled liquid 1B is solidified to become ice particles. COPYRIGHT: (C)2004,JPO&NCIPI