发明名称 MANUFACTURING DATA ANALYZING METHOD AND PROGRAM FOR MAKING COMPUTER PRACTICE THE SAME
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a manufacturing data analyzing method in which variation factors of product inspection data can be extracted by units of actual machining. <P>SOLUTION: The method of analyzing manufacturing data on products by performing a plurality of manufacturing processes by a plurality of manufacturing facilities includes a process of sequentially extract feature degrees appearing in the inspection data on the products according to feature data regarding a manufacturing process, and manufacturing facilities as to simultaneous processing units of the products and manufacture history data regarding the feature data and a process of outputting the feature degrees in size order. The feature degrees of the inspection data are extracted while simultaneous processing units, processing positions, and processing times of the manufacturing facilities and machining mechanisms that actually machine the products are taken into consideration, so factors directly influencing the inspection data can accurately be grasped and accurate measures for yield improvement can be taken. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p>
申请公布号 JP2004186374(A) 申请公布日期 2004.07.02
申请号 JP20020350968 申请日期 2002.12.03
申请人 FUJITSU LTD 发明人 SHIRAI EIDAI
分类号 G06Q50/00;G06Q50/04;H01L21/02;(IPC1-7):H01L21/02;G06F17/60 主分类号 G06Q50/00
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