METHOD FOR UNIFORMLY HEATING CIRCULAR FLAT PLATE SAMPLE

摘要

PROBLEM TO BE SOLVED: To provide an excellent method for uniformly heating a circular flat plate sample which can heat the sample keeping a uniform temperature distribution until it reaches a prescribed temperature and hold it at the prescribed temperature. SOLUTION: This method for uniformly heating the circular plate-form sample heats the sample in a uniform temperature distribution until it reaches the prescribed temperature and holds it at the prescribed temperature using a plurality of circular lamps which are oppositely arranged in parallel and concentrically to the plane of the sample. The power ratio among the circular lamps is optimized separately at least immediately after the start of heating and when the sample is held at the prescribed temperature. COPYRIGHT: (C)2004,JPO&NCIPI