| 摘要 |
PROBLEM TO BE SOLVED: To provide a power source capable of cutting off abrupt current such as arc discharge and making its scale compact, and to provide a power source for sputtering and a sputtering device. SOLUTION: In this power source, the power in the forward direction is output to a load to perform the regular operation, and when the load impedance is reduced, the voltage in the reverse direction is output to the load, and the power in the forward direction is output. When the power in the forward direction is output at the voltage closer to zero than the voltage in the regular operation, the output of the current is limited to a value smaller than the rated current, and the output current in a state that arc discharge occurs can be limited. COPYRIGHT: (C)2004,JPO&NCIPI
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