Method for fabricating multilayered thin film PZT structures for small form factors

摘要

An integrated gimbal and PZT structure. The structure includes a substrate, which has a first surface and a second surface. The first surface is opposite to the second surface and sandwiches a thickness of material of the substrate. The structure also includes an isolation layer formed overlying the first surface of the substrate and a patterned layer of PZT material overlying the isolation layer overlying the substrate. A tongue portion is formed from a first portion of the substrate for a gimbal structure of a suspension assembly. A spring portion is formed from a second portion of the substrate. The spring portion is coupled between a lower portion of the suspension assembly and the tongue portion.