发明名称 Multilayer laser trim interconnect method
摘要 A method for creating electrical interconnects between a semiconductor die and package. In the preferred embodiment, an insulating material is applied over the die and extends to the substrate contact pads, leaving a portion of each contact pad exposed. Holes are then trimmed through the insulating material, exposing at least a portion of each die bond pad. A conductive material is then applied over the die, flowing into the holes, contacting the die bond pads, and extending out to contact at least a portion of each substrate contact pad. In another preferred embodiment, an electrically conductive bump may be formed on each die bond pad, protruding through said non-conductive material and at least partially through said conductive material. The conductive layer is then laser trimmed, forming conductive patches that serve as electrical interconnects between the die and package substrate.
申请公布号 US6756252(B2) 申请公布日期 2004.06.29
申请号 US20020197165 申请日期 2002.07.17
申请人 TEXAS INSTRUMENT INCORPORATED 发明人 NAKANISHI NOBORU
分类号 H01L21/60;H01L23/538;(IPC1-7):H01L21/44 主分类号 H01L21/60
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