LASER-INDUCED PLASMA MICROMACHINING

摘要

A method and system for laser ablating a target material in an ambient atmosphere are disclosed. The method includes generating one or more laser pulses, each of the laser pulses having a pulse width of 1 picosecond (ps) or less and a pulse energy of 50 micro joules (muJ) or more. The laser pulses are directed towards the target material such that the laser pulses interact with a gas to form a plasma. The plasma removes a portion of the target material by interaction of the plasma with the target material.