发明名称 |
EMITTANCE MEASURING DEVICE FOR ION BEAMS |
摘要 |
Methods and apparatus are disclosed for rapidly providing for a large number of closely spaced points within an area at right angle to the central trajectory of an ion beam data concerning intensity variations, emittance variations and angular variations of elementary beamlets with respect to the central beam trajectory. The technology is particular applicable to the application and control of ribbon beams used for semiconductor implantation. |
申请公布号 |
WO2004053943(A2) |
申请公布日期 |
2004.06.24 |
申请号 |
WO2003US39376 |
申请日期 |
2003.12.11 |
申请人 |
PURSER KENNETH H;RUSSO CARL J;TUNER NORMAN L |
发明人 |
PURSER KENNETH H;RUSSO CARL J;TUNER NORMAN L |
分类号 |
H01J37/244;H01J37/304;H01J37/317;H01L |
主分类号 |
H01J37/244 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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