| 发明名称 |
Vertically adjustable chemical mechanical polishing head having a pivot mechanism and method for use thereof |
| 摘要 |
The invention provides a vertically adjustable chemical mechanical polishing head having a pivot mechanism and method for use thereof.
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| 申请公布号 |
US2004121704(A1) |
申请公布日期 |
2004.06.24 |
| 申请号 |
US20030700984 |
申请日期 |
2003.11.04 |
| 申请人 |
EBARA TECHNOLOGIES INCORPORATED |
发明人 |
SAKURAI KUNIHIKO;MOLONEY GERARD;WANG HUEY-MING;LIU JUN;LAO PETER |
| 分类号 |
B24B37/00;B24B37/04;B24B37/30;B24B47/22;H01L21/304;(IPC1-7):B24B49/00;B24B51/00 |
主分类号 |
B24B37/00 |
| 代理机构 |
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