| 摘要 |
PROBLEM TO BE SOLVED: To provide an aligner which can shorten the conveyance time of a board into a vacuum chamber. SOLUTION: This aligner has three consecutive load lock chambers 27, 28, and 29 which are connected to a main chamber 20. Slits 16a, 17a, and 18a are made in the bulkheads 16, 17, and 18 between the chambers. In this aligner, a series of four consecutive chambers in which the degrees of vacuum go down one figure in every stage are constituted from the first stage load lock chamber 27 to a main chamber 20, and this aligner carries a wafer W, making it pass the slits 16a, 17a, and 18a in each bulkhead 16, 17, and 18 in order from on the table 25 within the first stage load lock chamber 27 to the wafer stage 11 within the main chamber 20, using a roller 30 for transfer. At this time, this can carry the wafer W in a short period of time on a level of approximately ten sec. to one minute at most. COPYRIGHT: (C)2004,JPO |
