SILICA GLASS JIG USED IN PROCESS FOR MANUFACTURING SEMICONDUCTOR AND METHOD OF MANUFACTURING SILICA GLASS JIG,申请号AU20030289124-传众专利搜索

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发明名称	SILICA GLASS JIG USED IN PROCESS FOR MANUFACTURING SEMICONDUCTOR AND METHOD OF MANUFACTURING SILICA GLASS JIG
摘要
申请公布号	AU2003289124(A1)	申请公布日期	2004.06.23
申请号	AU20030289124	申请日期	2003.12.02
申请人	SHIN-ETSU QUARTZ PRODUCTS CO., LTD.	发明人	CHIKASHI ITO;TOSHIFUMI IWAMI;HIROYUKI KIMURA
分类号	H01L21/673;(IPC1-7):H01L21/306	主分类号	H01L21/673
代理机构		代理人
主权项
地址

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