| 摘要 |
PROBLEM TO BE SOLVED: To provide a thermopile array sensor which is superior in S/N, by ingeniously removing the white noise of the sensor itself, noise due to the temperature variation of the surroundings, and the 1/f noise caused by a DC amplifier. SOLUTION: In the thermopile array sensor 3, in which the plurality of measurement thermopiles A<SB>1</SB>-A<SB>4</SB>, B<SB>1</SB>-B<SB>4</SB>, C<SB>1</SB>-C<SB>4</SB>, and D<SB>1</SB>-D<SB>4</SB>are arranged on a semiconductor substrate 5, light-shielded compensating thermopiles X<SB>1</SB>-X<SB>4</SB>are provided to the semiconductor substrate 5. The measurement thermopiles A<SB>1</SB>-A<SB>4</SB>, B<SB>1</SB>-B<SB>4</SB>, C<SB>1</SB>-C<SB>4</SB>, and D<SB>1</SB>-D<SB>4</SB>and the compensating thermopiles X<SB>1</SB>-X<SB>4</SB>are provided, with respective switches Q<SB>r11</SB>-Q<SB>r45</SB>and Q<SB>c11</SB>-Q<SB>c45</SB>for extracting signals. The operational processing is performed, on the basis of the differences between the outputs of the measurement thermopiles A<SB>1</SB>-A<SB>4</SB>, B<SB>1</SB>-B<SB>4</SB>, C<SB>1</SB>-C<SB>4</SB>, and D<SB>1</SB>-D<SB>4</SB>and of the compensating thermopiles X<SB>1</SB>-X<SB>4</SB>. COPYRIGHT: (C)2004,JPO
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