| 摘要 |
PROBLEM TO BE SOLVED: To appropriately operate a pump for pumping by preventing over rotation speed driving of a motor. SOLUTION: The motor 2m of the pump 2 for pumping is driven by pressure constant control. When the rotation speed of the motor 2m exceeds a set rotation speed by the pressure constant control, the driving control of the motor 2m is switched from the pressure constant control to rotation speed constant control to suppress over rising of the rotation speed of the motor 2m. COPYRIGHT: (C)2004,JPO
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