发明名称 DIVALENT METAL OXIDE DOPED ALUMINIUM OXIDE, PRODUCED BY FLAME HYDROLYSIS AND AQUEOUS DISPERSIONS THEREOF
摘要 Aluminium oxide doped with a divalent metal oxide, produced by flame hydrolysis and which has no spinell structures or alpha-aluminium detectable in an x-ray diffractogram. It is produced by a pyrogenic process in which, during the flame hydrolysis of aluminium halogenides, an aerosol, which contains an aqueous solution of a divalent metal salt is added to the gas mixture. The doped aluminium oxides can be used in aqueous dispersions for chemical-mechanical polishing.
申请公布号 KR20040049859(A) 申请公布日期 2004.06.12
申请号 KR20047004924 申请日期 2002.09.23
申请人 发明人
分类号 C01F7/30;C01F7/02;C03C19/00;C09C1/04;C09D17/00;C09G1/02;C09K3/14;H01L21/02;H01L21/304;H01L21/306;H01L21/321 主分类号 C01F7/30
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