| 摘要 |
PROBLEM TO BE SOLVED: To provide a film peeling apparatus capable of suppressing a charging phenomenon that generates a potential on the surface of a substrate when peeling a film, and to provide a film peeling method. SOLUTION: In the film peeling apparatus 50 to peel off a base film 1 from a CF (color film) substrate 13 on which the base film 1 is applied, the base film 1 is peeled off from the CF substrate 13 while a voltage in the opposite polarity to the potential which would be generated on the surface of the CF substrate 13 when peeling the base film 1 if no voltage is applied 1 is applied on the base film 1. The apparatus can suppress the charging phenomenon that generates the potential on the surface of the CF substrate 13 when peeling the base film 1. COPYRIGHT: (C)2004,JPO
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