| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for circularly using grinding material which separatively removes unwanted particles in size apt to be intermingled when resupplying a new grinding material, as well as ensuring a long-haul successful separative function by inhibiting clogging while accurately and efficiently maintaining condition of the circularly-used grinding material. SOLUTION: The device for circularly using grinding material is equipped with a separating means separating foreign materials from a hopper 7 storing used grinding material into a grinding material circulation passage connected with a spray nozzle 4. On this device, a bypass route 14 branching from the above grinding material circulation passage via passage switching means 12, 13 to downstream side of a 1st separating means 10 and then returning to the grinding material circulation passage again, and a 2nd separating means 11 separating foreign materials rather smaller or lighter than those of the 1st separating means 10 into the bypass route 14, are provided. Thus, use of the 2nd separating means 11 separating rather smaller or lighter foreign materials which may likely cause clogging is limited only when necessary, thereby reducing frequency of clogging. COPYRIGHT: (C)2004,JPO
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