| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem that a fine gap is generated in the mutual connection by cables via the connectors provided at the chamber separation wall, and thereby the special environment is gradually unstabled due to the leak or the like for the necessity of transmission of commands for control and telemetry signals for measurement between a control object in the special environment (such as the environment filled with high concentration gas or highly evacuated environment) and a control device installed in the usual environment, and also to realize the control by conducting telemetry transmission and reception of commands in the optical communication between the control apparatus and control object by eliminating a connector interface in view of improving the operation time of the apparatus through smooth maintenance. SOLUTION: A transmission and reception circuit utilizing optical fiber is installed between the control apparatus in the usual environment and the control object in the special environment, and the control is realized through telemetry transmission and reception of commands. COPYRIGHT: (C)2004,JPO
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