发明名称 On-chip vacuum microtube device and method for making such device
摘要 In accordance with the invention, improved vacuum microtube devices are provided with arrangements for tunably spacing the gate and the cathode. Tuning can be effected by using an electrostatic or magnetic actuator to move the gate on a spring or a rail. Advantageously a feedback arrangement can be used to control the spacing. Magnetic reassembly components can be provided for facilitating release of tube components in fabrication.
申请公布号 US2004108550(A1) 申请公布日期 2004.06.10
申请号 US20030646600 申请日期 2003.08.23
申请人 JIN SUNGHO 发明人 JIN SUNGHO
分类号 H01J1/02;H01J9/18;H01J9/24;H01J21/08;H01J23/04;H01L31/119;H01P;(IPC1-7):H01L31/119 主分类号 H01J1/02
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