| 摘要 |
PROBLEM TO BE SOLVED: To provide a dust-free flow sensor of a reduced electric consumption for measuring a flow velocity of a fluid such as a gas flow velocity, capable of detecting a flow direction and a very small flow velocity, and having excellent durability. SOLUTION: This flow sensor 1 for measuring the gas flow velocity has a fluid receiving part 2 displaced by wind force of measured gas 10, a conductive part 3 displaced together with the fluid receiving part 2, and a displacement detecting part 5 fixed in a position not contacting with the measured gas 10 opposed to the conductive part 3, and for detecting a displacement of the conductive part 3. COPYRIGHT: (C)2004,JPO
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