METHOD FOR FABRICATING POLYIMIDE OPTICAL WAVEGUIDE USED FOR OPTICAL COMMUNICATION, OPTICAL INFORMATION PROCESS, AND GENERAL OPTIC FIELD

摘要

PURPOSE: A method for fabricating a polyimide optical waveguide used for optical communication, an optical information process, and a general optic field is provided to have a low loss rate of a polyimide resin by forming a core layer with a polyimide resin. CONSTITUTION: An under-cladding layer(2) is formed on a substrate(1). A photosensitive polyimide resin precursor composition layer(3) is formed on the under-cladding layer. Ultraviolet rays are irradiated on the photosensitive polyimide resin precursor composition layer except for a region corresponding to a core pattern. An exposure process and a heating process are performed thereon. A UV-unexposed region(6) of the photosensitive polyimide resin precursor composition layer is removed by performing a development process. A cladding layer having a predetermined pattern is formed by heating a UV-exposed region(5) of the photosensitive polyimide resin precursor composition layer to imidize the UV-exposed region. A core layer is formed by coating and heating a polyamic acid on the region corresponding to the core pattern and the surface of the cladding layer. An over-cladding layer is formed on the core layer.