SEMICONDUCTOR INSPECTING SYSTEM, SEMICONDUCTOR DEFECT ANALYZING SYSTEM, SEMICONDUCTOR DESIGN DATA MODIFYING SYSTEM, SEMICONDUCTOR INSPECTING METHOD, SEMICONDUCTOR DEFECT ANALYZING METHOD, SEMICONDUCTOR DESIGN DATA MODIFYING METHOD, AND COMPUTER READABLE RECORDED MEDIUM

摘要

A semiconductor inspecting system extracts a region to be inspected from a design data of a semiconductor device and divides the region by a lattice to prepare lattice regions; derives a numerical value indicative of a design characteristic of the design data every one of the lattice regions to prepare a design characteristic item data; prepares a characteristic classification data by classifying the design characteristic item data into a desired number of groups; extracts the lattice regions at random from the characteristic classification data at a constant sampling rate; acquires a defect inspection data by actually inspecting a pattern of the extracted lattice regions processed on the basis of the design data; and calculates the number of defects in the whole region to be inspected on the basis of the defect inspection data, the characteristic classification data and the sampling rate.