摘要 |
PROBLEM TO BE SOLVED: To produce at low cost a solar cell high in efficiency by forming in a short time and stably a zinc oxide film having an excellent optical confinement effect and using the film as the photovoltaic element. SOLUTION: In the production method of the zinc oxide film forming the zinc oxide film on the conductive substrate 103 by energizing between a conductive substrate 103 immersed in an electrodeposition bath 104 and a counter electrode 105 immersed in the electrodeposition bath 104, the temp. of the electrodeposition bath is kept at >=50 deg.C, and a temp. profile in which the temp. of the electrodeposition bath at a final stage of the electrodeposition is lower than that at an initial stage is given. |