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摘要
申请公布号
JP3535005(B2)
申请公布日期
2004.06.07
申请号
JP19980082183
申请日期
1998.03.27
申请人
发明人
分类号
H01L23/12;H01P5/02;(IPC1-7):H01L23/12
主分类号
H01L23/12
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