摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an optical modulator achieving a stable drive for a long time by relaxing stress caused in a recess formed on a substrate surface in the optical modulator and controlling degradation in an optical modulation control resulted from a stress strain in the substrate including an optical waveguide. <P>SOLUTION: The optical modulator is provided with a substrate consisting of materials having an electrooptic effect, the optical waveguide 4 arranged on the substrate and control electrodes 20-25 for controlling phase of light wave-guided in the optical waveguide. The modulator is arranged with the recess 12 on the surface forming the control electrodes of the substrate, and a stress relaxation means is arranged in the control electrode 24 formed on the recess. <P>COPYRIGHT: (C)2004,JPO</p> |