发明名称 |
Production of a nano-element arrangement used in microelectronics comprises partially covering a first nano-element with a catalyst material to catalyze |
摘要 |
Production of a nano-element arrangement comprises partially covering a first nano-element with a catalyst material to catalyze the growth of the nano-elements, and growing a second nano-element on the catalyst material. An Independent claim is also included for a nano-element arrangement produced by the above process.
|
申请公布号 |
DE10252607(A1) |
申请公布日期 |
2004.06.03 |
申请号 |
DE2002152607 |
申请日期 |
2002.11.12 |
申请人 |
INFINEON TECHNOLOGIES AG |
发明人 |
UNGER, EUGEN;DUESBERG, GEORG STEFAN;GRAHAM, ANDREW;LIEBAU, MAIK |
分类号 |
H01L51/30;(IPC1-7):B82B3/00 |
主分类号 |
H01L51/30 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|