发明名称 Production of a nano-element arrangement used in microelectronics comprises partially covering a first nano-element with a catalyst material to catalyze
摘要 Production of a nano-element arrangement comprises partially covering a first nano-element with a catalyst material to catalyze the growth of the nano-elements, and growing a second nano-element on the catalyst material. An Independent claim is also included for a nano-element arrangement produced by the above process.
申请公布号 DE10252607(A1) 申请公布日期 2004.06.03
申请号 DE2002152607 申请日期 2002.11.12
申请人 INFINEON TECHNOLOGIES AG 发明人 UNGER, EUGEN;DUESBERG, GEORG STEFAN;GRAHAM, ANDREW;LIEBAU, MAIK
分类号 H01L51/30;(IPC1-7):B82B3/00 主分类号 H01L51/30
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