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发明名称
VERFAHREN UND VORRICHTUNG ZUM AUFLOESEN EINES FILMES AN EINEM HALBLEITERSUBSTRAT
摘要
申请公布号
DE3516973(A1)
申请公布日期
1986.01.02
申请号
DE19853516973
申请日期
1985.05.10
申请人
KABUSHIKI KAISHA TOSHIBA
发明人
SHIMAZAKI,AYAKO
分类号
G01N1/28;H01L21/28;H01L21/311;H01L21/66;(IPC1-7):H01L21/306;H01L21/268
主分类号
G01N1/28
代理机构
代理人
主权项
地址
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