ELECTRO-OPTICAL DEVICE, METHOD FOR MANUFACTURING ELECTRO-OPTICAL DEVICE, AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To realize accurate alignment by preventing slippage around an axis in an image pickup direction between 1st and 2nd substrates. SOLUTION: In the electro-optical device comprising the 1st substrate 2 on which a pair of 1st alignment marks 2b are formed and the 2nd substrate 3 on which a pair of 2nd alignment marks 3a are formed, the adjacent 1st and 2nd alignment marks 2b, 3a have a regulated interval in the image pickup direction, the length of a common segment connecting a midpoint P1connecting the pair of 1st alignment marks 2b with each other and a midpoint P2connecting the pair of the 2nd alignment marks 3a with each other is regulated length L1and the segment connecting the pair of 1st alignment marks 2b with each other intersects with the common segment at a regulated angleθ. COPYRIGHT: (C)2004,JPO