BARRIER MEMBRANE FOR PROTECTING THIN FILM DISPLAY ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a barrier membrane for protecting a thin film display element excellent in a barrier property in which the thin film display element such as an organic EL display element and a liquid crystal display element is effectively prevented from being deteriorated due to ambient oxigen and water vapor. SOLUTION: The barrier membrane for protecting the thin film display element is manufactured by a physical deposition method using SiC as a raw material for deposition. In the physical deposition method using SiC as a raw material for deposition, a highly close barrier membrane can be deposited to form the barrier membrane excellent in the performance of protecting the element by such a close membrane. COPYRIGHT: (C)2004,JPO