DEFECT ANALYZER FOR SEMICONDUCTOR INTEGRATED CIRCUIT, SYSTEM, AND DETECTION METHOD

摘要

PROBLEM TO BE SOLVED: To facilitate defect analysis work by executing defect analysis for a semiconductor integrated circuit by using a more simplified analyzer. SOLUTION: This defect analyzer is characterized in that the semiconductor integrated circuit is irradiated with an electromagnetic field by a probe, and fluctuation in electrical characteristics in the integrated circuit such as power supply current fluctuation is detected by an open gate or by activating gate potential, thereby detecting whether defects exist or not. COPYRIGHT: (C)2004,JPO