| 摘要 |
<P>PROBLEM TO BE SOLVED: To accurately measure graphite deposited on the surface of cast iron having a recessed part. <P>SOLUTION: A height distribution at the same spot and in the same region as a spot measured by a CCD camera is measured by an interference microscope simultaneously with measurement of an image brightness value by the CCD camera. Image data of the detected height distribution are transmitted to a height binarization part 22. The height binarization part 22 determines a part having the lower height than a prescribed threshold as a recessed part, and binarized into the recessed part and the other part. Image data wherein only the recessed parts are distributed can be acquired in this way. Then, an operation part 24 performs operation based on data transmitted from a brightness binarization part 20 and data transmitted from the height binarization part 22, and can grasp accurately a distribution of only the graphite 12. <P>COPYRIGHT: (C)2004,JPO |
