| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To construct a CIM (Computer Integrated Manufacturing) system capable of reducing loads imposed on a host computer and instructing for processing condition for every substrate unit and instructing for the starting sequence of processes for every substrate unit. <P>SOLUTION: A recipe applied to each substrate is managed not by a host computer but by each manufacturing device. Each manufacturing device stores one or more recipes with numbers attached. Thus, since there is no need in the host computer to manage the contents of the concrete recipes for every substrate in each manufacturing device, even if the recipes of the manufacturing device and decision of the sequence of processes are managed not in the carrier unit but in the substrate unit, it is possible to reduce the loads on the host computer. <P>COPYRIGHT: (C)2004,JPO</p> |
