FIELD EMISSION TYPE X-RAY SOURCE

摘要

PROBLEM TO BE SOLVED: To provide an X-ray source in which such difficulty that operation is necessary in the ultra-high vacuum is overcome in the X-ray source, which has a simple structure without filaments and has a field emission type electron emission source having advantages such as that high quality X-ray emission can be made. SOLUTION: A negative electrode 12 selects gas adsorption materials of Pd or the like as a substrate to become a growth parent of a carbon nanofiber 12b and it constitutes a grouping having a structure that a microcrystal 12c of the gas adsorption materials is added or built in the tip part of the carbon nanofiber 12b on the substrate. COPYRIGHT: (C)2004,JPO