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发明名称
EFFUSIONSZELLE FÜR MOLEKULARSTRAHLENEPITAXIE
摘要
申请公布号
DE69908792(T2)
申请公布日期
2004.05.19
申请号
DE19996008792T
申请日期
1999.09.07
申请人
COHERENT, INC.
发明人
SALOKATVE, K.;POOLE, C.
分类号
C23C14/24;C30B23/06;(IPC1-7):C30B23/06
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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