发明名称 Ferroelectric memory device and method of forming the same
摘要 A ferroelectric memory device along with a method of forming the same are provided. A first interlayer insulating layer is formed on a semiconductor substrate. A buried contact structure is formed on the first interlayer insulating layer. The buried contact structure is electrically connected to the substrate through a first contact hole extending through the first interlayer insulating layer. A blocking layer covers or encapsulates the buried contact structure and the first interlayer insulating layer. A second interlayer insulating layer is formed on the blocking layer. A ferroelectric capacitor formed on the second interlayer insulating layer and is electrically connected to the buried contact structure through a second contact hole that penetrates the second interlayer insulating layer and the blocking layer.
申请公布号 US6737694(B2) 申请公布日期 2004.05.18
申请号 US20020066172 申请日期 2002.01.30
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM KI-NAM;SONG YOON-JONG
分类号 H01L27/105;H01L21/02;H01L21/314;H01L21/318;H01L21/768;H01L21/8246;H01L27/115;(IPC1-7):H01L27/108 主分类号 H01L27/105
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