DIFFUSION FURNACE HAVING HEATING PART

摘要

PURPOSE: A diffusion furnace having a heating part is provided to be capable of preventing the generation of residues at a cover part. CONSTITUTION: A diffusion furnace having a heating part is provided with a reaction chamber for loading a process object body, a diffusion furnace body part for enclosing the reaction chamber, and a cover part(124) for airtightly sealing the open end portion of the reaction chamber. The diffusion furnace further includes a resistance formed at the inner portion of the cover part for heating the cover part and a controlling part(130) for controlling the flow of current at the resistance. Preferably, the resistance is formed along the edge portion of the cover part. Preferably, the resistance is silicon rubber.