发明名称 |
RETAINER, EXPOSURE APPARATUS, AND SEMICONDUCTOR DEVICE FABRICATION METHOD |
摘要 |
A retainer for holding an optical element (110) having three first grooves (116) includes a first support member (120) that supports the optical element through the first grooves, and a second support member (130) that has three second grooves corresponding to the first grooves (132), and supports the first support member through the second grooves. |
申请公布号 |
WO2004011984(A3) |
申请公布日期 |
2004.05.13 |
申请号 |
WO2003JP09533 |
申请日期 |
2003.07.28 |
申请人 |
CANON KABUSHIKI KAISHA;TAKABAYASHI, YUKIO |
发明人 |
TAKABAYASHI, YUKIO |
分类号 |
G02B7/02;G03F7/20 |
主分类号 |
G02B7/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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