DEPLETION LAYER CAPACITANCE CALCULATION APPARATUS AND C-V CHARACTERISTIC MEASURING APPARATUS OF SEMICONDUCTOR

摘要

PROBLEM TO BE SOLVED: To provide a depletion layer capacitance calculation apparatus and a C-V characteristic measuring apparatus of a semiconductor which accurately calculate capacitance of a depletion layer in the semiconductor for actually extending in all directions from an applying electrode in a width corresponding to an applied voltage on the assumption that the depletion layer extends in the depth direction only. SOLUTION: The depletion layer capacitance calculation apparatus 5 and the C-V characteristic measuring apparatus 1 accurately calculate the capacitance of the depletion layer in the semiconductor 7 for actually extending in all directions from the applying electrode 8 in the width corresponding to the applied voltage on the assumption that the depletion layer extends in the depth direction only. A depletion layer capacitance calculation means is provided and calculates true depletion layer capacitance on the assumption that the depletion layer extends in a depth actually equal. COPYRIGHT: (C)2004,JPO