| 摘要 |
<p>Positioning apparatus comprises: a first stage, capable of moving in a first direction and a second direction which is orthogonal to the first direction; a second stage, arranged on the first stage, and capable of adjusting a position and a rotation on the first stage; and a driving mechanism for positioning the second stage. The driving mechanism includes: a first electromagnet which generates first suction power; a second electromagnet, provided opposite to and away from the first electromagnet, which generates second suction power; and a core member, which is held movable between the first and second electromagnets, and moves by being pulled in accordance with the first and/or second suction power.</p> |
